ESCOBAR ALARCON, LUIS; Solís Casados, Dora Alicia; ROMERO MARQUEZ, JAVIER SAUL; Haro-Poniatowski, Emmanuel
(springer nature, 2020-01-01)
A hybrid configuration for multicomponent thin film deposition by combining two laser ablation plasmas with one sputtering plasma is presented. This setup was used to deposit TiO2 thin films modified simultaneously with ...