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dc.contributor.author	CAMACHO LOPEZ, MIGUEL ANGEL
dc.contributor.author	GALEANA CAMACHO, JOSE ROMAN
dc.contributor.author	ESPARZA GARCIA, ALEJANDRO
dc.contributor.author	SANCHEZ PEREZ, CELIA ANGELINA
dc.contributor.author	Julien, Christian
dc.creator	CAMACHO LOPEZ, MIGUEL ANGEL; 122933
dc.creator	GALEANA CAMACHO, JOSE ROMAN;x1341998
dc.creator	ESPARZA GARCIA, ALEJANDRO; 835133
dc.creator	SANCHEZ PEREZ, CELIA ANGELINA; 31285
dc.creator	Julien, Christian;#0000-0003-4357-3186
dc.date.accessioned	2016-03-16T17:19:19Z
dc.date.available	2016-03-16T17:19:19Z
dc.date.issued	2013
dc.identifier	http://www.redalyc.org/articulo.oa?id=94229715005
dc.identifier.uri	http://hdl.handle.net/20.500.11799/39993
dc.description	Nanostructured tin oxide thin films were deposited on silicon and glass slides substrates by reactive DC-Magnetron sputtering using a tin target in a mixture of argon and oxygen gases. The substrate temperature was varied in the range from 53 to 243 oC, keeping the other deposition parameters constant. The tin oxide films were characterized by: Scanning Electron Microscopy, Energy Dispersive Spectrometry, X Ray Diffraction, microRaman spectroscopy and UV-VIS spectroscopy. It was found that the substrate temperature has an effect mainly on the structural, morphological and optical properties of the thin films. At 53 and 90 oC the tetragonal crystalline phase was obtained while a mixture of crystalline phases (o-SnO2 and t-SnO2) was obtained at 148, 185 and 243 oC.
dc.format	application/pdf
dc.language.iso	eng	es
dc.publisher	Sociedad Mexicana de Ciencia y Tecnología de Superficies y Materiales A.C.
dc.relation	http://www.redalyc.org/revista.oa?id=942
dc.rights	Superficies y vacío
dc.rights	openAccess	es
dc.rights.uri	http://creativecommons.org/licenses/by-nc-nd/4.0
dc.source	Superficies y vacío (México) Num.3 Vol.26
dc.subject	Física, Astronomía y Matemáticas	es
dc.subject	DC-magnetron sputtering	es
dc.subject	tin oxide	es
dc.subject	raman spectroscopy	es
dc.subject.classification	CIENCIAS FÍSICO MATEMÁTICAS Y CIENCIAS DE LA TIERRA
dc.title	Characterization of nanostructured SnO2 films deposited by reactive DC-magnetron sputtering	es
dc.type	Artículo	es
dc.provenance	Científica	es
dc.road	Dorada	es
dc.ambito	Internacional	es
dc.audience	students	es
dc.audience	researchers	es
dc.type.conacyt	article
dc.identificator	1

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